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                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                             ----------------------

                                   SCHEDULE TO
                                  (Rule 13e-4)
            Tender Offer Statement Under Section 14(d)(1) or 13(e)(1)
                     of the Securities Exchange Act of 1934

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                            Nanometrics Incorporated
         (Name of Subject Company (Issuer) and Filing Person (Offeror))

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            Options to Purchase Common Stock, No Par Value Per Share
                         (Title of Class of Securities)

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                                    630077105
         (CUSIP Number of Class of Securities' Underlying Common Stock)

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                                 John D. Heaton
                             Chief Executive Officer
                            Nanometrics Incorporated
                               1550 Buckeye Drive
                           Milpitas, California 95035
                                 (408) 435-9600
       (Name, address and telephone number of person authorized to receive
             notices and communications on behalf of filing person)

                             ----------------------

                                   Copies to:
                              Aaron J. Alter, Esq.
                        Wilson Sonsini Goodrich & Rosati,
                            Professional Corporation
                               650 Page Mill Road
                        Palo Alto, California 94304-1050
                                 (650) 493-9300

                            CALCULATION OF FILING FEE

======================================= ========================================
         Transaction Valuation*                    Amount of Filing Fee
--------------------------------------- ----------------------------------------
             $8,260,104.20                               $759.93
======================================= ========================================
*    Calculated  solely for purposes of determining  the filing fee. This amount
     assumes  that  options  to  purchase  1,962,020  shares of common  stock of
     Nanometrics  Incorporated  having an aggregate value of $8,260,104.20 as of
     November 7, 2002 will be exchanged or cancelled pursuant to this offer. The
     aggregate  value of such options was calculated  based on the closing price
     of  Nanometrics'  shares on November 7, 2002. The amount of the filing fee,
     calculated in accordance  with Rule 0-11 of the Securities  Exchange Act of
     1934,  as  amended,  equals  $92 for each  $1,000,000  of the  value of the
     transaction.

[ ]  Check  the  box if any  part  of the  fee is  offset  as  provided  by Rule
     0-11(a)(2)  and  identify  the  filing  with which the  offsetting  fee was
     previously  paid.  Identify the previous filing by  registration  statement
     number, or the Form or Schedule and the date of its filing.

Amount Previously Paid:   Not applicable.
Form or Registration No.: Not applicable.
Filing party:             Not applicable.
Date filed:               Not applicable.


[ ]  Check the box if the filing  relates solely to  preliminary  communications
made before the commencement of a tender offer.

[ ]  Check the  appropriate  boxes below to designate any  transactions to which
     the statement relates:
     [ ]   third party tender offer subject to Rule 14d-1.
     [X]   issuer tender offer subject to Rule 13e-4.
     [ ]   going-private transaction subject to Rule 13e-3.
     [ ]   amendment to Schedule 13D under Rule 13d-2.

Check the following box if the filing is a final amendment reporting the results
of the tender offer: [ ]

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     This  Tender  Offer  Statement  on  Schedule  TO  relates  to an  offer  by
Nanometrics  Incorporated,   a  California  corporation  ("Nanometrics"  or  the
"Company"),  to exchange options to purchase an aggregate of 1,962,020 shares of
the Company's common stock,  whether vested or unvested,  that have been granted
under either its 1991 Stock Option Plan or 2000 Employee  Stock Option Plan that
have  exercise  prices equal to or greater than $10.00 per share (the  "Eligible
Options") and that are held by eligible employees (the "Exchange Offer").  These
Eligible Options may be exchanged for new options that will be granted under the
Company's 2000 Employee Stock Option Plan or 2002 Nonstatutory Stock Option Plan
(the "New  Options"),  upon the terms and subject to the conditions set forth in
(i) the Offer to Exchange,  dated  November 12, 2002 (the "Offer to  Exchange");
(ii) the related letter from Vincent J. Coates,  dated November 12, 2002;  (iii)
the Election Form; and (iv) the Withdrawal Form. These documents, as they may be
amended or supplemented from time to time,  together  constitute the "Disclosure
Documents"  and are attached to this Schedule TO as Exhibits  (a)(1)(a)  through
(a)(1)(d),  respectively.  An "eligible  employee" refers to all persons who are
employees  of the Company on  November  12,  2002 and who are  residents  of the
United States and remain employees through the date on which the New Options are
granted.  Non-employee  directors are  ineligible to participate in the exchange
offer.

     The  information  contained  in the  Disclosure  Documents,  including  all
schedules and annexes to the Disclosure Documents,  is incorporated by reference
in answer to the items required in this Schedule TO.

Item 1.    Summary Term Sheet.

     The  information  set forth under the caption  "Summary  Term Sheet" in the
Offer to Exchange is incorporated herein by reference.

Item 2.    Subject Company Information.

     (a) Name and Address.

     Nanometrics is the issuer of the securities  subject to the Exchange Offer.
The address of the Company's  principal  executive office is 1550 Buckeye Drive,
Milpitas,  California  95035 and the  telephone  number at that address is (408)
435-9600.  The  information set forth in the Offer to Exchange under the caption
"The  Offer--Information  concerning  Nanometrics"  is  incorporated  herein  by
reference.

     (b) Securities.

     The subject  class of  securities  consists of the  Eligible  Options.  The
actual  number of shares of common stock subject to the New Options to be issued
in the  Exchange  Offer  will  depend on the  number  of shares of common  stock
subject to the unexercised  options tendered by eligible  employees and accepted
for exchange and cancelled.  The  information set forth in the Offer to Exchange
under the captions  "Summary Term Sheet," "Risks of Participating in the Offer,"
and the  sections  under the caption  "The Offer"  entitled  "Number of options;
expiration  date,"  "Acceptance  of options  for  exchange  and  issuance of new
options,"  "Source  and  amount  of  consideration;  terms  of new  options"  is
incorporated herein by reference.

     (c) Trading Market and Price.

     The  information  set forth in the Offer to Exchange under the caption "The
Offer--Price  range of shares underlying the options" is incorporated  herein by
reference.

                                      -2-



Item 3.    Identity and Background of Filing Person.

     (a) Name and Address.

     The filing person is the issuer.  The information set forth under Item 2(a)
above is incorporated by reference.

     Pursuant to General Instruction C to Schedule TO, the information set forth
on Schedule A to the Offer to Exchange is incorporated herein by reference.

Item 4.    Terms of the Transaction.

     (a) Material Terms.

     The  information  set forth in the  Offer to  Exchange  under the  captions
"Summary  Term Sheet" and the sections  under the caption  "The Offer"  entitled
"Eligibility," "Number of options; expiration date," "Procedures for electing to
exchange options,"  "Withdrawal  rights and change of election,"  "Acceptance of
options for exchange and issuance of new  options,"  "Conditions  of the offer,"
"Source and amount of  consideration;  terms of new  options,"  "Price  range of
shares  underlying the options," "Status of options acquired by us in the offer;
accounting  consequences of the offer," "Legal matters;  regulatory  approvals,"
"Material  U.S.  federal  income tax  consequences,"  and  "Extension  of offer;
termination; amendment" is incorporated herein by reference.

     (b) Purchases.

     The  information  set forth in the Offer to Exchange under the caption "The
Offer--Interests  of  directors  and  officers;  transactions  and  arrangements
concerning the options" is incorporated herein by reference.

Item 5.    Past Contacts, Transactions, Negotiations and Arrangements.

     (e) Agreements Involving the Subject Company's Securities.

     The  information  set forth in the Offer to Exchange under the caption "The
Offer--Interests  of  directors  and  officers;  transactions  and  arrangements
concerning the options" is incorporated herein by reference. The eligible option
plans and related option agreements attached hereto as Exhibits (d)(1),  (d)(2),
(d)(3),  (d)(4),  (d)(5) and (d)(6)  contain  information  regarding the subject
securities.

Item 6.    Purposes of the Transaction and Plans or Proposals.

     (a) Purposes.

     The  information  set forth in the  Offer to  Exchange  under the  captions
"Summary  Term  Sheet" and "The  Offer--Purpose  of the  offer" is  incorporated
herein by reference.

                                      -3-



     (b) Use of Securities Acquired.

     The  information set forth in the Offer to Exchange under the captions "The
Offer--Acceptance  of options for exchange and issuance of new options" and "The
Offer--Status of options acquired by us in the offer; accounting consequences of
the offer" is incorporated herein by reference.

     (c) Plans.

     The  information set forth in the Offer to Exchange under the captions "The
Offer--Purpose  of  the  offer"  and  the  "The  Offer--Information   concerning
Nanometrics" is incorporated herein by reference.

Item 7.    Source and Amount of Funds or Other Consideration.

     (a) Source of Funds.

     The  information set forth in the Offer to Exchange under the captions "The
Offer--Source and amount of consideration; terms of new options" is incorporated
herein by reference.

     (b) Conditions.

     Not applicable.

     (d) Borrowed Funds.

     Not applicable.

Item 8.    Interest in Securities of the Subject Company.

     (a) Securities Ownership.

     The  information  set forth in the Offer to Exchange under the caption "The
Offer--Interests  of  directors  and  officers;  transactions  and  arrangements
concerning the options" is incorporated herein by reference.

     (b) Securities Transactions.

     The  information  set forth in the Offer to Exchange under the caption "The
Offer--Interests  of  directors  and  officers;  transactions  and  arrangements
concerning the options" is incorporated herein by reference.

Item 9.    Person/Assets, Retained, Employed, Compensated or Used.

     (a) Solicitations or Recommendations.

     Not applicable.


                                      -4-


Item 10.   Financial Statements.

     (a) Financial Information.

     The  information  set forth in  Schedule  B and  Schedule C to the Offer to
Exchange and in the Offer to Exchange under the captions "The Offer--Information
concerning   Nanometrics,"   "The   Offer--Financial   statements,"   and   "The
Offer--Additional   information"  is  incorporated  herein  by  reference.   The
Company's Annual Report on Form 10-K and its Quarterly  Reports on Form 10-Q can
also be accessed  electronically  on the  Securities  and Exchange  Commission's
website at HTTP://WWW.SEC.GOV.

     (b) Pro Forma Information.

     Not applicable.

Item 11.   Additional Information.

     (a) Agreements, Regulatory Requirements and Legal Proceedings.

     The  information  set forth in the Offer to Exchange under the caption "The
Offer--Legal matters; regulatory approvals" is incorporated herein by reference.

     (b) Other Material Information.

     Not applicable.

Item 12.   Exhibits.

     Exhibit
      Number                               Description
      ------                               -----------

    (a)(1)(a)           Offer to Exchange Certain Outstanding Options for New
                        Options, dated November 12, 2002.

          (b)           Letter from Vincent J. Coates, dated November 12, 2002.

          (c)           Election Form.

          (d)           Withdrawal Form.

          (e)           Form of Promise to Grant Stock Option.

    (b)   Not applicable.

    (d)(1)*             Nanometrics  Incorporated  1991 Stock  Option  Plan,  as
                        amended  through May 15,  1997,  incorporated  herein by
                        reference to Exhibit 4.1 to the  Company's  Registration
                        Statement  on Form S-8 (File No.  333-33583)  filed with
                        the  Securities  and Exchange  Commission  on August 14,
                        1997.

       (2)*             Form  of  stock   option   agreement   for   Nanometrics
                        Incorporated 1991 Stock Option Plan, incorporated herein
                        by   reference   to   Exhibit   4.1  to  the   Company's
                        Registration


                                      -5-


                        Statement  on Form S-8 (File No.  333-33583)  filed with
                        the  Securities  and Exchange  Commission  on August 14,
                        1997.

       (3)*             Nanometrics  Incorporated  2000  Employee  Stock  Option
                        Plan,  as  amended  May  2002,  incorporated  herein  by
                        reference to Exhibit 4.1 to the  Company's  Registration
                        Statement  on Form S-8 (File No.  333-91714)  filed with
                        the Securities and Exchange Commission on July 1, 2002.

       (4)*             Form  of  stock   option   agreement   for   Nanometrics
                        Incorporated    2000   Employee   Stock   Option   Plan,
                        incorporated  herein by  reference to Exhibit 4.2 to the
                        Company's  Registration  Statement on Form S-8 (File No.
                        333-40866)   filed  with  the  Securities  and  Exchange
                        Commission on July 6, 2000.

       (5)*             Nanometrics  Incorporated 2002 Nonstatutory Stock Option
                        Plan, incorporated herein by reference to Exhibit 4.1 to
                        the Company's  Registration  Statement on Form S-8 (File
                        No.  333-101137) filed with the  Securities and Exchange
                        Commission on November 12, 2002.

       (6)*             Form  of  stock   option   agreement   for   Nanometrics
                        Incorporated  2002   Nonstatutory   Stock  Option  Plan,
                        incorporated  herein by  reference to Exhibit 4.1 to the
                        Company's  Registration  Statement on Form S-8 (File No.
                        333-101137)  filed  with  the  Securities  and  Exchange
                        Commission on November 12, 2002.

    (g)   Not applicable.
    (h)   Not applicable.

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  * Previously filed.

Item 13.   Information Required by Schedule 13E-3.

     (a) Not applicable.


                                      -6-


                                    SIGNATURE


     After due inquiry  and to the best of my  knowledge  and belief,  I certify
that the  information  set  forth in this  Schedule  TO is  true,  complete  and
correct.

                                        NANOMETRICS INCORPORATED


                                        /s/ John D. Heaton
                                        ----------------------------------------
                                        John D. Heaton
                                        President and Chief Executive Officer


Date:  November 12, 2002




                                INDEX TO EXHIBITS


     Exhibit
     Number                                Description
     ------                                -----------

   (a)(1)(a)        Offer  to  Exchange  Certain  Outstanding  Options  for  New
                    Options dated November 12, 2002.

   (a)(1)(b)        Letter from Vincent J. Coates, dated November 12, 2002.

   (a)(1)(c)        Election Form.

   (a)(1)(d)        Withdrawal Form.

   (a)(1)(e)        Form of Promise to Grant Stock Option.

   (d)(1)*          Nanometrics  Incorporated 1991 Stock Option Plan, as amended
                    through May 15,  1997,  incorporated  herein by reference to
                    Exhibit 4.1 to the Company's  Registration Statement on Form
                    S-8 (File  No.  333-33583)  filed  with the  Securities  and
                    Exchange Commission on August 14, 1997.

   (d)(2)*          Form of stock option agreement for Nanometrics  Incorporated
                    1991 Stock Option Plan,  incorporated herein by reference to
                    Exhibit 4.1 to the Company's  Registration Statement on Form
                    S-8 (File  No.  333-33583)  filed  with the  Securities  and
                    Exchange Commission on August 14, 1997.

   (d)(3)*          Nanometrics Incorporated 2000 Employee Stock Option Plan, as
                    amended  May  2002,  incorporated  herein  by  reference  to
                    Exhibit 4.1 to the Company's  Registration Statement on Form
                    S-8 (File  No.  333-91714)  filed  with the  Securities  and
                    Exchange Commission on July 1, 2002.

   (d)(4)*          Form of stock option agreement for Nanometrics  Incorporated
                    2000  Employee  Stock  Option Plan,  incorporated  herein by
                    reference  to  Exhibit  4.2  to the  Company's  Registration
                    Statement  on Form S-8 (File No.  333-40866)  filed with the
                    Securities and Exchange Commission on July 6, 2000.

   (d)(5)*          Nanometrics  Incorporated  2002  Nonstatutory  Stock  Option
                    Plan, incorporated herein by reference to Exhibit 4.1 to the
                    Company's  Registration  Statement  on Form  S-8  (File  No.
                    333-101137)   filed  with  the   Securities   and   Exchange
                    Commission on November 12, 2002.

   (d)(6)*          Form of stock option agreement for Nanometrics  Incorporated
                    2002 Nonstatutory Stock Option Plan,  incorporated herein by
                    reference  to  Exhibit  4.1  to the  Company's  Registration
                    Statement  on Form S-8 (File No.  333-101137) filed with the
                    Securities and Exchange Commission on November 12, 2002.

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* Previously filed.